SCIENCE & EDUCATION

References

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3. DeJule R. Dual-Damascene: Overcoming Process Issues.  Available at: http://www.semiconductor.net/article/204962-Dual_Damascene_Overcoming_Process_Issues.php , accessed 09.04.2010.

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6. Gladkikh A.A. Analiz povtoriaemosti i tochnosti modelirovaniia operatsii khimiko-mekhanicheskoi planarizatsii sloia dvuokisi kremniia [Analysis of the repeatability and accuracy of modeling the operation of chemical-mechanical planarization layer of silicon dioxide]. 13-ia Molodezhnaia mezhdunarodnaia nauchno-tekhnicheskaia konferentsiia «Naukoemkie tekhnologii i intellektual'nye sistemy» 2011 [The 13th International Youth Scientific Conference “High Technologies and Intelligent Systems” 2011]. Moscow, Bauman MSTU Publ., 2011. pp. 324-338

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