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scientific edition of Bauman MSTUSCIENCE & EDUCATIONBauman Moscow State Technical University. El № FS 77 - 48211. ISSN 1994-0408
Thermally isolated cells in designs of transducers of physical quantities made by an electrostatic anodic bonding of semi-conductor and dielectric elements
# 12, December 2012 DOI: 10.7463/0113.0517471
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