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SCIENCE & EDUCATION

Bauman Moscow State Technical University.   El № FS 77 - 48211.   ISSN 1994-0408

Thermal compensation of the measuring channel of the pressure sensor on the basis of semi-conductor integrated transducers

# 11, November 2012
DOI: 10.7463/1112.0482504
Article file: Цыганков_P.pdf (474.86Kb)
authors: A.B. Borzov, K.P. Likhoedenko, V. Yu. Cygankov, A.I. Vlasov, Yu.N. Tinyakov, K.A. Andreev, T.A. Civinskaya

References

            1. Barinov I.N. Poluprovodnikovye tenzorezistivnye datchiki davleniia na osnove KND – struktury [Semiconductor tensoresistive pressure sensor on the basis of the Silicon-on-Insulator structure]. Komponenty i tekhnologii [Components and technologies], 2009, no. 5, pp. 12-15.

            2. Volodin V.Ia. Kompensatsiia temperaturnogo dreifa nulia integral'nogo tenzorezistivnogo datchika davleniia [Compensation of temperature drift of zero of integral tensoresistive pressure sensor]. Available at: http://valvolodin.narod.ru/articles/Tcomp_0.pdf  , accessed 03.11.2012.

            3. Ageev O.A., Mamikonova V.M., Petrov V.V., Kotov V.N., Negodenko O.N. Mikroelektronnye preobrazovateli neelektricheskikh velichin [Microelectronic converters of non-electric values]. Taganrog, TRTU Publ., 2000. 153 p.

            4. Stuchebnikov V.M. O normirovanii temperaturnoi pogreshnosti tenzorezistornykh poluprovodnikovykh datchikov [About the normalization of temperature error of tensoresistive semiconductor sensors]. Datchiki i sistemy [Sensors and systems], 2004, no. 9, pp. 15-19.

            5. Katkov A.N. Algoritmy korrektsii pogreshnostei tenzometricheskikh datchikov davleniia tsifrovymi vtorichnymi preobrazovateliami [Algorithms correction of the errors of the tensoresistive pressure sensor by the use of digital secondary converters]. Molodoi uchenyi [Young scientist], 2011, vol. 1, no. 8, pp. 58-60.

            6. Martynov D.B., Stuchebnikov V.M. Temperaturnaia korrektsiia tenzopreobrazovatelei davleniia na osnove KNS [Temperature correction of tensoconverters of pressure on the basis of the Silicon-on-Sapphire].  Datchiki i sistemy [Sensors and systems], 2002, no. 10, pp. 6-12.

7. Vaganov V.I., Beklemishev V.V. Skhema temperaturnoi kompensatsii integral'nogo preobrazovatelia davleniia [Temperature compensation circuitry of integral converter of pressure]. Izmeritel'naia tekhnika [Мeasurement technique], 1977, no. 5, pp. 24-27.

8. Osadchii E.P. Kompensatsiia additivnoi temperaturnoi pogreshnosti tenzodatchika s pomoshch'iu dopolnitel'nogo signala [Compensation of additive temperature error of load cell with the help of additional signal]. Datchiki sistem izmereniia, kontrolia i upravleniia : mezhvuzovskii sb. nauch. tr. [Sensors systems for measurement, control and management : the interuniversity collection of scientific works]. Penza, PPI Publ., 1981.

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