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scientific edition of Bauman MSTU

SCIENCE & EDUCATION

Bauman Moscow State Technical University.   El № FS 77 - 48211.   ISSN 1994-0408

Experimental studies of plasma-chemical etching of glass when manufacturing diffraction and hologram optical elements

# 05, May 2012
DOI: 10.7463/0512.0408094
Article file: Одиноков_P.pdf (578.54Kb)
authors: S.B. Odinokov, G.R. Sagatelyan, A.S. Goncharov, M.S. Kovalev, A.B. Solomashenko, N.M. Verenikina

References

 1.              Volkov A.V., Kazanskii N.L., Soifer V.A., Usplen'ev G.V. Tekhnologiia sozdaniia DOE [The technology of creation of diffraction optical elements (DOE)]. In book: Metody komp'iuternoi optiki [Methods of computer optics]. Moscow, Fizmatlit, 2000. C. 239-310.2000. – S. 239 – 310.

2.              Volkov A.V., Kazanskii N.L., Kolpakov V.A. Raschet skorosti plazmokhimicheskogo travleniia kvartsa [The calculation of the rate of plasma chemical etching of quartz]. Komp'iuternaia optika, 2001, no. 21, pp. 121-125.

3.              Dudin S.V. Issledovaniia i razrabotka tekhnologicheskikh sistem na baze VCh induktsionnogo razriada dlia reaktivnogo ionno-plazmennogo travleniia mikro- i nanostruktur [Research and development of technological systems based on high-frequency induction discharge for reactive ion-plasma etching of micro-and nanostructures]. Fizicheskaia inzheneriia poverkhnosti, 2009, vol. 7, no. 3, pp. 171-194.

4.              Berlin E., Dvinin S., Morozovskii N., Seidman L. Reaktivnoe ionno-plazmennoe travlenie i osazhdenie: ustanovka Karolina 15 [Reactive ion-plasma etching and deposition: plant Carolina 15]. Elektronika: Nauka, Tekhnologiia, Biznes [Electronics: Science, Technology, Business], 2005, no. 8, pp. 78-80.

5.              Berlin E. V., Seidman L.A. Ionno-plazmennye protsessy v tonkoplenochnoi tekhnologii [Ion-plasma processes in thin-film technology]. Moscow, Tekhnosfera, 2010. 544 p.

6.              Odinokov S. B., Sagatelian G. R.   Tekhnologiia izgotovleniia difraktsionnykh i gologrammnykh opticheskikh elementov s funktsional'nym mikrorel'efom poverkhnosti metodom plazmokhimicheskogo travleniia [Technology of Manufacturing of Diffraction and Hologram Optical Parts with Functional Microrelief of Surface by Method of Plasmochemical Etching]. Vestnik MGTU im. N. E. Baumana. Ser. Priborostroenie [Herald of the Bauman MSTU. Ser. Instrumentation], 2010, no. 2, pp. 92-104.

7.              Rozhkov O.V., Timashova L.N. Vosproizvedenie tsvetokodirovannoi fazoopticheskoi zapisi v sistemakh otobrazheniia informatsii [Reproduction of color-coded phase-optical recording of the information display systems]. Trudy MVTU im. N.E.Baumana [Proc. of the Bauman MSTU], 1979, no. 309, pp. 21-36.


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